Au Nanoparticles on SiO2

ALI-1000 Deposition System

In the last decade, the use of nanoparticles has extended to different fields of research. Nanoparticles can be produced in many different ways, one of these being epitaxial growth in UHV. However, in some cases, instead of growing the nanoparticles in UHV, we may wish to deposit nanoparticles that have been produced ex-situ. For these cases, ALI deposition system is an ideal solution.
MORE INFOA single drop of a colloid of 20 nm gold nanoparticles deposited by ALI has been analyzed using a scanning electron microscope (SEM).

The figure on the right shows a SEM image of gold nanoparticles on a Si wafer. These were obtained after a 200mbar injection of a gold nanoparticle colloid with a density of 1012 particles/ml. The an ALI-sample distance was about 20cm. The distribution of the remaining material after the drop’s evaporation is inhomogeneous: most of the nanoparticles are located at the edge of the drop on the surface. The zoom images confirm that the material is formed by gold nanoparticles with an average size around 20 nm.




Au nanoparticles (ca 20nm)


H2O, <0.01% tannic acid, <0.04% sodium citrate, 0.01% HAuCl4


ca 103 particles/ml

Inj. Conditions

p=1000mbar, 10 x [topen=100; tclose=120s]